Series 225 AUTO-SOFT® Flow-actuated Check Valves

photo - Series 225 AUTO-SOFT® Flow-actuated Check Valves

The MKS Series 225 AUTO-SOFT® is a flow actuated check valve used for throttling roughing pumps during initial evacuation. AUTO-SOFT® check valves close very quickly at the start of system evacuation and open automatically upon reaching a set pressure differential. This leaves the pumping line open for the balance of the pumping process. (read more)

Features & Benefits:

  • Reduces particulate contamination
  • Prevents displacement or breakage of substrates
  • Replaces expensive pressure controlled bypass systems
  • Operates automatically without electrical or other external power
  • Replaces ISO-KF centering ring for easy installation


In semiconductor, thin film, and other industries, AUTO-SOFT® check valves replace pressure controlled bypass valves to provide a soft start and reduce turbulence in the vacuum system. When used with potting compounds, Auto-Soft check valves prevent excessive foaming. An Auto-Soft check valve used in a vacuum glove box avoids the rupture of filters. On a system with a mechanical pump, Auto-Soft check valve reduces exhaust oil mists.
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Download the 225 AUTO-SOFT® data sheet

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Tel: 978-645-5500

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