Features & Benefits:
- Reduces particulate contamination
- Prevents displacement or breakage of substrates
- Replaces expensive pressure controlled bypass systems
- Operates automatically without electrical or other external power
- Replaces ISO-KF centering ring for easy installation
In semiconductor, thin film, and other industries, AUTO-SOFT® check valves replace pressure controlled bypass valves to provide a soft start and reduce turbulence in the vacuum system. When used with potting compounds, Auto-Soft check valves prevent excessive foaming. An Auto-Soft check valve used in a vacuum glove box avoids the rupture of filters. On a system with a mechanical pump, Auto-Soft check valve reduces exhaust oil mists.