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LoPro™
Low-profile, Single-stage, Unheated, Vacuum Isolation Valves

photo - LoPro Low-profile, Single-stage, Unheated, Vacuum Isolation Valve

LoPro™ Valves have a smaller profile, are lighter, lower in cost, and easier to maintain than similar valves. With its small footprint, this valve easily fits into existing and new vacuum systems. A formed stainless steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extending life cycle. (read more)

MKS LoPro™ Valves are compact vacuum valves designed for high performance in gauge or system isolation.

  • Compact, low profile
  • Designed for easy maintenance
  • Manual or pneumatic actuation
  • Angle and Inline body styles
  • Port diameters of 1, 1½, & 2 inches
  • KF, CF flanges, or weld stubs
  • Multiple seal options

LoPro™ Low-profile Valves are ideally suited for semiconductor manufacturing, process industries, high energy physics research, and thin film deposition.
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Download the LoPro Single Stage Valve data sheet

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MKS Instruments
2 Tech Drive, Suite 201, Andover, MA 01810 USA

Tel: 978-645-5500

Email: mks@mksinst.com


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