Low-profile, Single-stage, Unheated, Vacuum Isolation Valves
LoPro™ Valves have a smaller profile, are lighter, lower in cost, and easier to maintain than similar valves. With its small footprint, this valve easily fits into existing and new vacuum systems. A formed stainless steel bellows prevents outgassing, virtual leaks, and particle entrapment between bellows convolutions and extending life cycle. (read more)
MKS LoPro™ Valves are compact vacuum valves designed for high performance in gauge or system isolation.
- Compact, low profile
- Designed for easy maintenance
- Manual or pneumatic actuation
- Angle and Inline body styles
- Port diameters of 1, 1½, & 2 inches
- KF, CF flanges, or weld stubs
- Multiple seal options
LoPro™ Low-profile Valves are ideally suited for semiconductor manufacturing, process industries, high energy physics research, and thin film deposition.
Download the LoPro Single Stage Valve data sheet
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