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Rapid Isolation Valve
High Speed, Fast Closing Valve

photo - Rapid Isolation Valve

During a wafer fab pump failure, particles and turbulence caused by the backstream can irreparably damage the wafer load. The Rapid Isolation Fast Closing Valve addresses this problem. No additional facilitization is necessary to install and operate Rapid Isolation high speed, fast closing valves. (read more)

MKS Rapid Isolation Valves are high speed, fast closing valves are based on popular MKS vacuum valve designs.

  • No addtional facilitization needed
  • Valve sizes from NW16 to NW160

Rapid Isolation Valves are used to prevent backstream contamination during a wafer fab pump failure.
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MKS Instruments
2 Tech Drive, Suite 201, Andover, MA 01810 USA

Tel: 978-645-5500

Email: mks@mksinst.com


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