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a-Baratron® Heated Absolute Capacitance Manometers
for General Purpose Vacuum/Pressure Measurement

(0.1-1000 Torr/13.3 Pa - 133.3 kPa)

photo - a-Baratron Heated Absolute Capacitance Manometers for General Purpose Vacuum/Pressure Measurement (0.1-1000 Torr/13.3 Pa - 133.3 kPa)

The MKS a-Baratron® manometer is an advanced general purpose absolute heated capacitance manometer developed specifically for use in vacuum and pressure measurement applications where high accuracy and excellent repeatability are crucial to process success. These capacitance manometers are internally heated to 45°, 80°, or 100°C. (read more)

They use state-of-the-art digital architecture throughout to produce the highest possible long-term performance and reliability. They can be equipped with either the standard sensor or MKS’ patented Etch Baffle sensor technology that greatly reduces process contamination, and they can be configured for both new and existing processing systems. These manometers operate on ±15 VDC or +24 VDC input voltage, and have legacy 0-10 VDC analog serial output signals. Full Scale measurement ranges from 0.1 Torr (13.3 Pa) to 1000 Torr (133.3 kPa) are available. The a-Baratron manometer is fully CE and RoHS (Restriction of Hazardous Substances) compliant.

Features & Benefits:

  • All-digital architecture and improved thermal management provides better long-term stability, improved accuracy, and increased reliability
  • Sensor temperatures of 45°, 80°, or 100°C
  • Fully welded sensor built entirely from Inconel® and Incoloy® nickel alloys for best-available corrosion resistance; uses no intermediate brazing or joining materials
  • Full Scale measurement ranges from 0.1 Torr (13.3 Pa) to 1000 Torr (133.3 kPa)
  • Pushbutton zero permits adjustment of zero position up to 20% of product’s Full Scale range
  • Operates on ±15 VDC or +24 VDC input voltage, and provides 0 - 10 VDC analog serial output that are linear with pressure
  • Standard or MKS’ patented Etch sensor for use in processes with condensable byproducts
  • CE and RoHS compliant
  • 100% backwards-compatible with previous MKS 127, 128, 627, 628,E27, & E28 analog Baratron® manometers

Applications:

a-Baratron® capacitance manometers are designed for use in a wide variety of processes including semiconductor etching and deposition, optical coating, and medical sterilization.
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See the specifications

a-Baratron® Pin-Outs

Download the a-Baratron® data sheet

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MKS Instruments
2 Tech Drive, Suite 201, Andover, MA 01810 USA

Tel: 978-645-5500

Email: mks@mksinst.com


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