Optical Gas Analyzers

MultiGas™ & AIRGARD® FTIR (Fourier Transform Infrared) and Process Sense™ NDIR (Nondispersive Infrared) real-time and in-line gas analysis Instruments from MKS are capable of ppb to ppm sensitivity for multiple gas species including NF3, NH3, H2, NO and N2O and gases with as much as 30% water.

The Precisive® TFS™ (Tunable Filter Spectroscopy) sensor platform consists of a light source, a sample cell (for gases, liquids or solids), a wavelength separating element (spectrometer) and a photo-detector. A wavelength separating element "slices" the wavelength components of the broadband light source which then interacts with the sample molecules. The resulting spectrum acts as "fingerprints" which are used to identify sample components and/or quantify the sample composition.

MultiGas™, AIRGARD® FTIR Products

Precisive® TFS™ Products

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MKS Instruments
2 Tech Drive, Suite 201, Andover, MA 01810 USA

Tel: 978-645-5500

Email: mks@mksinst.com

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