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Plasma Products

Remote Plasma Sources for NF3 and Fluorine-based Gases

ASTRON®i AX7670 Remote Plasma Source (rated to 3.0 slm NF3 flow rate)

ASTRON®ex AX7685 Remote Plasma Source (rated to 6.0 slm NF3 flow)

ASTRON® Paragon AX7700 Remote Plasma Source (rated to 6.0 slm NF3 flow)

ASTRON®hf-s (split) AX7645 Remote Plasma Source (rated to 15.0 slm NF3 flow)

ASTRON®hf AX7640 Remote Plasma Source (rated to 15.0 slm NF3 flow)

ASTRON®hf+ AX7635 Remote Plasma Source (rated to 22.0 slm NF3 flow)

ASTRON®G7 AX7667 High Flow Remote Plasma Source (rated 20-30 SLM of NF3 & 20-30 Torr pressure)

Plasma Sources for O2, N2, H2, H2O

R*evolution® III AX7695 Remote RF Plasma Source

AX7610-Q Chemical Downstream Plasma Source with a Quartz Tube

AX7610-S Chemical Downstream Plasma Source with a Saphire Tube

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MKS Instruments
2 Tech Drive, Suite 201, Andover, MA 01810 USA

Tel: 978-645-5500

Email: mks@mksinst.com


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